MICROSYSTEMS TECHNOLOGY IN GERMANY

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1 MICROSYSTEMS TECHNOLOGY IN GERMANY MIKROSYSTEMTECHNIK IN DEUTSCHLAND

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4 Table of Contents 6 Welcoming Address Grußwort Dr. Annette Schavan Federal Minister for Education and Research Bundesministerin für Bildung und Forschung 8 Positioning in International Competition Zur Positionierung im internationalen Wettbewerb 10 VDE-GMM: Microsystems Technology Drives Innovation in Leading Markets Mikrosystemtechnik Innovationstreiber für Leitmärkte 13 Contributions to Topical Fields of Innovation Beiträge zu aktuellen Innovationsfeldern 14 Helmut Seidel, Universität des Saarlandes: Microactuators 16 Peter Woias, IMTEK: MicroEnergy Harvesting Energy Supply for distributed embedded Microsystems 18 Jürgen Mohr, Forschungszentrum Karlsruhe: Micro-Optics 20 OSRAM Opto Semiconductors: High Brightness LEDs for Light Engines 22 Thomas Stieglitz, IMTEK: Intelligent Implants 24 Johannes Dehm, DGBMT im VDE: Latest Results and Solutions in Preventive Micromedicine 26 Reiner Wichert, Fraunhofer-Verbund Mikroelektronik: The Fraunhofer Alliance Ambient Assisted Living 28 Katrin Gaßner, VDI/VDE-IT: Smart Labels for Logistic Applications 30 Hartmut Strese, VDI/VDE-IT: Intelligent Technical Textiles 32 Herbert Reichl, Fraunhofer IZM, at al: More than Moore, Hetero System Integration and Smart System Integration Three Approaches one Goal: Smarter Products and Processes 38 The 2 nd German Congress on Microsystem Technologies 2007 Der 2. Deutsche Mikrosystemtechnik-Kongress Thomas Gessner, TU Chemnitz: Review of the 2 nd German Congress on Microsystem Technologies 42 Roland Zengerle, IMTEK, et al: Microfl uidic Platforms for Miniaturization, Integration and Automation of Biochemical Assays 44 Christian Voss, Jörg Müller, TU Hamburg-Harburg: A Mechanical Microsystem for Restoration of Spinal Cord Continuity after Paraplegia 46 Kathrin Knese, Robert Bosch GmbH, et al: Novel Surface Micromachining Technology for Fabrication of Capacitive Pressure Sensors Based on Porous Silicon 48 Thomas Otto, Ray Saupe, Fraunhofer IZM, et al: Forensic Investigation Using MEMS-Spectrometers 50 Anna Gerken, Johannes Paul, Sensitec GmbH: Use of the Tunnelmagnetoresistive Effect for Sensor Applications 52 Katrin Müller, Motorola GmbH: Nutriwear Nutrition Management Using Smart Textiles 4

5 Inhaltsverzeichnis 54 Jan-Uwe Schmidt, Fraunhofer IPMS, et al: Technology Development for 1 Megapixel-Micromirror Arrays with High Optical Fill Factor and Stable Analogue Defl ection 57 Associations and Networks Verbände und Netzwerke 58 ZVEI 60 AMA 62 IVAM 64 Mikrotechnik Thüringen with Micro-Hybrid Electronic GmbH Hermsdorfer Institut für Technische Keramik e. V. 68 Zentrum für Mikrosystemtechnik Berlin 71 Current Results and Portfolios of Research Institutions Aktuelle Ergebnisse und Leistungen aus Forschungseinrichtungen 72 Fraunhofer IFAM 74 ZfM Zentrum für Mikrotechnologien Technische Universität Chemnitz 76 NMI Naturwissenschaftliches und Medizinisches Institut an der Universität Tübingen, Reutlingen 78 IPHT Institut für Photonische Technologien, Jena 80 IMM Institut für Mikrotechnik Mainz 82 Hahn-Schickard-Gesellschaft 84 IMN Institut für Mikro- und Nanotechnologien der Technischen Universität Ilmenau 86 Fraunhofer IKTS 87 Current Innovations and Competencies of Companies Aktuelle Innovationen und Kompetenzen aus Unternehmen Microsystems Technology Products and Solutions Mikrosystemtechnische Produkte und Lösungen 88 Infi neon Technologies AG 90 Carl-Zeiss MicroImaging GmbH 92 UST Umweltsensortechnik GmbH 93 Greiner Bio-One GmbH 94 Plan Optik AG 96 MMT Micro Mechatronic Technologies GmbH 97 pro-micron GmbH & Co. KG Products and Solutions for Microsystems Technology Produkte und Lösungen für die Mikrosystemtechnik 98 Carl Zeiss Industrielle Messtechnik GmbH 100 Lumera Laser GmbH 101 Physik Instrumente (PI) GmbH & Co KG 102 Polytec GmbH 104 3D-Micromac AG 105 Rohwedder AG 106 LIMO Lissotschenko Mikrooptik GmbH 108 SONOSYS Ultraschallsysteme GmbH 109 MPD GmbH Microelectronic Packaging Dresden 110 technotrans AG 112 SCHUNK GmbH & Co. KG Spann- und Greiftechnik 113 ZMD Zentrum Mikroelektronik Dresden AG 114 Impressum Photo Credits/Bildnachweise 5

6 Welcoming Adress Dr. Annette Schavan, Federal Minister of Education and Research Bundesministerin für Bildung und Forschung With the introduction of the High-Tech Strategy for Germany just over a year ago, the Federal Government gave a clear signal that it intended to strengthen our country s innovative strength in the long term. For the fi rst time ever, we have a national strategy covering all fi elds of politics and aimed at leading Germany to the top in the most important markets of the future. One priority of the High-Tech Strategy, which is coordinated by the Federal Ministry of Education and Research, is the fi eld of microsystems technology. This cutting-edge fi eld has enormous potential. Microsystems technology can be used in almost all branches of industry to develop new products and improve existing ones. At the same time, microsystems technology is increasingly becoming a key technology for tackling diverse societal challenges, such as the problems of demographic change and climate change. Microsystems technology supplies the technical solutions to these problems. With an annual growth rate of 16 percent and a turnover of more that 277 billion Euros, microsystems technology is one of the major job machines in our country today. Some 680,000 jobs in Germany are closely connected with microsystems technology: fi fty thousand of them are in the immediate production of microsystems. And the trend is rising. For example, the fi eld of sensor technology, an important area of microsystems technology, is creating more jobs than ever before. More than 13,000 new jobs were created in 2007 alone. It is smaller fi rms in particular that are responsible for growth in this area. The technological development of microsystems technology is in no way complete: its potential for application has by no means been exhausted. In order to use this potential in Germany, the Federal Ministry of Education and Research is making project funding worth over 220 million Euros available between 2004 and 2009 under the Microsystems framework programme. Close cooperation between industry and science is an important precondition for the successful use of the opportunities linked with microsystems technology. The Federal Research Ministry therefore organized the Microsystems Technology Congress in conjunction with the VDE (Association for Electrical, Electronic & Information Technologies) for the second time in October More than 1000 experts at the Dresden conference set the course for Germany s future as a location for microsystems technology. Our aim is clear: Germany is to once again become the country with the best innovations. In the fi eld of microsystems technology we are on the right track. Dr Annette Schavan, MdB Federal Minister of Education and Research 6

7 Grußwort Mit der Hightech-Strategie für Deutschland hat die Bundesregierung vor etwas mehr als einem Jahr ein klares Signal gesetzt, die Innovationskraft unseres Landes nachhaltig zu stärken. Erstmals gibt es eine nationale Strategie über alle Politikfelder hinweg, um unser Land an die Weltspitze der wichtigsten Zukunftsmärkte zu führen. Ein Schwerpunkt der Hightech-Strategie, die vom Bundesministerium für Bildung und Forschung koordiniert wird, ist die Mikrosystemtechnik. In dieser Zukunftstechnologie steckt enormes Potenzial, denn mit Hilfe der Mikrosystemtechnik lassen sich in nahezu allen Industriebranchen neue Produkte entwickeln und bestehende verbessern. Gleichzeitig wird die Mikrosystemtechnik immer mehr zu einer Schlüsseltechnologie für die Lösung vielfältiger gesellschaftlicher Herausforderungen, die etwa durch die demografi sche Entwicklung oder den Klimawandel auf uns zukommen. Die Mikrosystemtechnik liefert dafür die technologischen Ansätze. Mit jährlich 16 Prozent Wachstum und einem Umsatzvolumen von mehr als 277 Milliarden Euro gehört die Mikrosystemtechnik zu den Jobmaschinen unseres Landes. Heute sind rund Arbeitsplätze in Deutschland mit der Mikrosystemtechnik eng verbunden, davon knapp direkt in der Produktion von Mikrosystemen. Die Tendenz ist steigend: Beispielsweise die Sensorik-Branche, ein wichtiges Feld der Mikrosystemtechnik, schafft so viele Arbeitsplätze wie nie zuvor. Allein im Jahr 2007 entstanden hier über neue Jobs. Dieses Wachstum wird vor allem durch die kleineren Firmen getragen. Die technologische Entwicklung der Mikrosystemtechnik ist bei weitem nicht abgeschlossen; ihre Anwendungspotenziale noch lange nicht ausgeschöpft. Um diese Potenziale in Deutschland zu nutzen, stellt das Bundesministerium für Bildung und Forschung darum mit dem Rahmenprogramm Mikrosysteme von 2004 bis 2009 über 220 Mio. Euro an Projektfördermitteln zur Verfügung. Eine wichtige Voraussetzung für die erfolgreiche Nutzung der mit der Mikrosystemtechnik verbundenen Chancen ist eine enge Kooperation zwischen Industrie und Wissenschaft. Bereits zum zweiten Mal veranstaltete das Bundesforschungsministerium deshalb im Oktober 2007 gemeinsam mit dem VDE den Mikrosystemtechnik-Kongress. Über 1000 Expertinnen und Experten stellten in Dresden die Weichen für die Zukunft des Mikrosystemtechnik-Standorts Deutschland. Unser Ziel ist klar: Deutschland soll wieder das Land mit den besten Innovationen werden. In der Mikrosystemtechnik sind wir auf dem besten Weg. Dr. Annette Schavan, MdB Bundesministerin für Bildung und Forschung 7

8 Positioning in International Competition Kapitelüberschrift Positioning in International Competition 8

9 Positioning in International Competition Positionierung im internationalen Wettbewerb 9

10 Positioning in International Competition Microsystems Technology Drives Innovation in Leading Markets VDE: Microsystems technology drives economic and technical progress in Germany and Europe though Europe is in a neck-to-neck race with the U.S. in microand nanotechnology innovations, and East Asia is gaining ground. Microsystems technology will undoubtedly continue to be a major key to Germany s success in leading markets of the future. With a worldwide market volume in the triple-digit billion-euro range and double-digit growth rates, microsystems technology (MST) is one of the biggest markets of the future. And the leveraging effect of MST applications estimated at 25 times that volume is even more important. All in all, MST ranks as one of the leading cross-disciplinary technologies of the 21st century. In the VDE s 2007 Innovation Monitor, VDE business and research experts consider microand nanotechnologies to be the primary stimulus for innovations. Microtechnical components are long since a mass market, and appear in products such as ink-jet pressure injectors, CD/DVD scanners, acceleration sensors for triggering airbags, and laser measurement systems for automation systems, minimally invasive medical procedures and in optics. MST also makes possible new production processes in nanometer dimensions, and is transforming traditional industries such as high-precision engineering and tool manufacturing for state-of-the-art injection molding. Germany has long been the technology leader for integrated systems solutions and continues to hold an outstanding position in the fi eld of microsystems technology as the most important European home by far for microelectronics and microtechnology. The VDE Innovation Monitor indicates that Germany will be able to continue defending its excellent technology position even In particular, microsystems technology drives industries in which Germany and Europe are traditionally strong, such as the automotive industry, medical engineering and the information and communications sector. In the future, the Internet of things will not only be used to transport data, but to directly operate a wide range of devices. Smart labels (RFIDs), for example, are the fi rst step toward networking IT systems and enabling independent interaction among intelligent devices (machine-to-machine communication), such as in the multimedia sector. To optimally exploit the potential of German science and build bridges between research and future markets, the German government s high-tech strategy has designated microsystems technology as the forerunner for intelligent products. It is orienting its MST program toward meeting important needs in 10

11 Zur Positionierung im internationalen Wettbewerb Dr.-Ing. Dr. sc. techn. Klaus-Dieter Lang stellv. Vorstandsvorsitzender der VDE/VDI Gesellschaft GMM Fraunhofer Institut Zuverlässigkeit und Mikrointegration (IZM), Deputy Director Dipl.-Ing. Dipl. Wirtsch.- Ing. Dirk Friebel Vorstandsvorsitzender der VDE/VDI Gesellschaft GMM NOKIA, Research Center Germany, Bochum, Laboratory Director, General Manager the areas of environment, healthcare and resource effi ciency. The VDE and the Federal Ministry for Education and Research (BMBF) are already partners in many areas, such as the VDE/BMBF Microsystems Technology Congress and in precompetitive networking projects like micromedicine. The VDE/VDI Society of Microelectronics, Micro and Precision Engineering (GMM) comprises a broad network of microsystems technology experts organized in a number of specialist divisions. The GMM serves as a crucial interface for the cross-disciplinary exchange of expertise, and supports the growth of microsystems technology in Germany with position papers, workshops, conferences and promotional initiatives. The optimal focus and fi ne-tuning of innovation policies is especially important for microsystems technology, since the fi eld also has a major impact on Germany s competitive position in other key technologies and markets. In order to fully utilize the impressive potential of microsystems technology, one must further develop and expand the knowledge network, give highest priority to research needs in innovation fi elds, and tackle hindrances to innovation such as bureaucracy and the shortage of engineers. Mikrosystemtechnik Innovationstreiber für Leitmärkte Die Mikrosystemtechnik ist mit einem weltweiten Marktvolumen im dreistelligen Milliardenbereich und zweistelligen Wachstumsraten einer der großen Zukunftsmärkte. Von noch größerer Bedeutung ist der bemerkenswerte Hebeleffekt für MST-Anwendungen, der auf das 25-fache geschätzt wird. Damit zählt die MST zu den wichtigsten Querschnittstechnologien des 21. Jahrhunderts. VDE-Experten aus Unternehmen und Forschungsinstitutionen sehen nach dem VDE Innovationsmonitor 2007 die Mikro- und Nanotechnik sogar als Hauptimpulsgeber für Innovationen. Längst haben mikrotechnische Komponenten einen Massenmarkt geschaffen: z.b. als Tintenstrahl-Druckknöpfe, als CD/DVD-Abtastköpfe, als Beschleunigungssensoren zur Auslösung von Airbags, in Lasermesssystemen in der Automation, in der minimal invasiven Medizin oder in der Optik. Darüber hinaus entstehen durch Mikrosystemtechnik auch neue Fertigungs- und Produktionsverfahren, die bis in den Nanometerbereich reichen. Diese verändern derzeit traditionelle Branchen wie die Feinwerktechnik oder die Herstellung von Werkzeugen für den modernen Spritzguss. Deutschland ist seit vielen Jahren Technologieführer bei integrierten Systemlösungen und in der Mikrosystemtechnik nach wie vor hervorragend aufgestellt. Die Bundesrepublik ist mit Abstand der bedeutendste europäische Standort für Mikroelektronik und Mikrotechnik. Diese gute Technologieposition kann Deutschland laut VDE Innovationsmonitor auch künftig verteidigen, wenngleich sich Europa bei Innovationen der Mikro- und Nanotechnik ein Kopf-an-Kopf-Rennen mit den USA liefert und Ostasien an Boden gewinnt. Ohne Zweifel bleibt die Mikrosystemtechnik für Deutschland ein wichtiger Schlüssel zum Erfolg in den Leitmärkten der Zukunft. Insbesondere treibt die Mikrosystemtechnik Branchen an, in denen Deutschland und Europa traditionell stark sind, so zum Beispiel den Automobilbau und die Medizintechnik. Weitere Leitmärkte sind in der IKT-Branche auszumachen. So werden im künftigen Internet der Dinge nicht nur Daten, sondern auch viele Geräte direkt über das Internet 11

12 Positioning in International Competition genutzt. Die Funketiketten (Smart Labels, RFID) sind erste Ansätze in Richtung einer Vernetzung von IKT-Systemen und zur eigenständigen Interaktion intelligenter Endgeräte (Machine-to-Machine Kommunikation), etwa im Multimediabereich. Um das Potenzial der deutschen Wissenschaft optimal zu nutzen und Brücken zwischen Forschung und Zukunftsmärkten zu schlagen, hat die Bundesregierung die Mikrosystemtechnik als Wegbereiter für intelligente Produkte in die Hightech-Strategie aufgenommen und das Technologieprogramm Mikrosystemtechnik kontinuierlich auf die wichtigen gesellschaftlichen Bedürfnisse in den Bereichen Umwelt, Gesundheit und Ressourceneffi zienz ausgerichtet. In vielen Bereichen arbeiten VDE und BMBF gerade in der Mikrosystemtechnik sehr erfolgreich zusammen, etwa im Rahmen des VDE/BMBF Mikrosystemtechnik Kongresses und vorwettbewerblich angesiedelten Netzwerk-Projekten z.b. in der Mikromedizin. Die VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik (GMM) vereinigt ein weit verzweigtes Expertennetz auf dem breiten Gebiet der Mikrosystemtechnik, das sich in der GMM in einer Vielzahl von Fachgremien organisiert hat. Damit leistet die GMM einen wesentlichen Beitrag, um als Schnittstelle den fachübergreifenden Austausch von Expertenwissen zu gewährleisten. Die GMM trägt mit Positionspapieren, Workshops, Tagungen und Initiativen zur Förderpolitik dazu bei, der Mikrosystemtechnik in Deutschland Zukunftsperspektiven zu geben. Die richtige Fokussierung und Justierung innovationspolitischer Maßnahmen ist gerade in der Mikrosystemtechnik von herausragender Bedeutung. Denn sie wirkt sich auch auf die Wettbewerbs position Deutschlands in weiteren Spitzentechnologien und Leitmärkten aus. Deshalb müssen die Wissensnetzwerke weiter aus gebaut, die Forschungsför derung auf Innovationsfeldern mit höchster Priorität versehen und Innovationshemmnisse wie Büro kratie und Ingenieurmangel abgebaut werden. Nur so können die beachtlichen Potenziale der Mikrosystemtechnik voll ausgeschöpft werden. VDE/VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik (GMM) Dr. Ronald Schnabel Stresemannallee 15 D Frankfurt Phone +49(0) / 330 Fax +49(0) Mail gmm@vde.com Web Sub-nanometer resolution Low settling time QuickLock adapter High-precision flexure guidance Highly compact Look Sharp! PIFOC High Dynamics Piezo Nanofocusing Systems These extremely precise focusing systems are unique for their extra-long travel ranges and sub-nanometer resolution. With their minimal settling times and outstanding focus stability, they are winning over users in Life Sciences and Metrology. Travel Ranges up to 460 μm Resolution < 1 nm Linearity to 0.03 % You, too, can look sharp. info@pi.ws Physik Instrumente (PI) GmbH & Co. KG Tel

13 Beiträge zu aktuellen Innovationsfeldern Contributions to Topical Fields of Innovation

14 Contributions to Topical Fields of Innovation Microactuators Prof. Dr. Helmut Seidel Chair of Micromechanics, Microactuators/Microfl uidics, Department of Mechatronis Saarland University Microactuators are not only characterized by their smaller size in comparison to classical actuators, but defi ne themselves much more prominently by their way of production, which is derived from microsystem technology and is based on batch-processing steps. By their very nature, microactuators allow only small displacements and forces. Thus they have the largest application potential where only small forces are needed and where miniaturization is an advantage per se, e.g. because an array setup is required. Examples are applications that are aimed at the switching of small electrical currents, at the manipulation of light or of small volumes of fl uids. The ink-jet printer head, which controls the ejection of tiny droplets of ink onto the print medium, is amongst the most successful high volume devices in all microsystem technology. Similarly, analytical devices in life science applications, including control valves and micropumps, are rapidly gaining importance. Another highly successful microactuator is the digital mirror device from Texas Instruments. Switches and high frequency micromechanical oscillators for microwave applications in the GHz domain are rapidly gaining importance, even defi ning a new subclass of microsystem technology, called RF-MEMS. The principles used for generating forces in microactuators are the same as those encountered in classical actuators. However, due to the different scaling behaviour and the different compatibility with microsystem technologies, other forces dominate the scene. The most dominant driving mechanism Fig. 1 A silicon microvalve with combined magnetic/electrostatic actuation used for fl ow control in ion thrusters for satellite propulsion. a) schematic cross section. b) upper silicon chip with movable membrane for closing the valve. in conventional actuators is the electromagnetic force, with electrostatic forces only playing a side roll. Although they can also be generated quite easily in a parallel capacitor plate confi guration, their strength decreases inversely proportional to the distance of the plates. When we now look at the laws of scaling of these forces down to smaller dimensions, the situation observed in conventional actuators gets to be reversed. The electrostatic force is a surface force and therefore scales with the square of the length scale l involved in a system. Since volumes and inertial masses are scaled down by l³, electrostatic forces are actually gaining in relative strength by reducing the size of a structure, whereas electromagnetic forces scale much more unfavourable because of the limitations of current density and heat transfer from a coil to the surrounding environment. For some applications the simultaneous incorporation of two actuation principles in a hybrid way can be of interest. An example for this is the combined use of electromagnetic and electrostatic forces in a microvalve, which was developed by the author s group for controlling a xenon gas fl ow in ion thrusters used for satellite propulsion (Fig. 1). The electromagnetic force is applied for generating large displacements in opening or closing the valve, whereas the electrostatic force can keep the valve in its closed position with very little power consumption. The best known and most widespread microfl uidic system today is the ink-jet 14

15 Contributions to Topical Fields of Innovation Fig. 2 Digital Mirror Device from Texas Instruments. printer. The printer head as the enabling component is an example of a true microactuator that made it to a readily available product with overwhelming commercial success, being produced in ever increasing numbers. The principle setup of this device can be described as follows: An ink reservoir feeds a pressure chamber which is in direct contact with a linear arrangement of microscopic nozzles, shooting out droplets of ink on demand towards the print medium. In the more traditional setup a piezoelectric element is employed as an actuation principle to contract a wall of the chamber, thus increasing the pressure which leads to the ejection of an ink droplet. As an alternative, the application of a phase-change thermopneumatic principle has become very popular. A short heating pulse (< 10 μs) induced by an electric resistor vaporizes the ink in the chamber, generating a gas bubble which leads to a substantial increase in pressure, causing a small droplet of ink to be ejected from the nozzle. Microactuators have a large potential in optical applications, since no large forces are required for the manipulation of light. The digital micromirror device (DMD) is one of the most successful microsystem devices ever produced from an economical point of view. Its idea goes back to an invention made by L.J. Hornbeck at Texas Instruments in At its heart stands a pixelated array of defl ectable micromirrors that can be addressed and actuated individually to display an image on a projector screen, when combined with the illumination and optics required for this purpose. The mirror structures are fabricated after the completion of the CMOS process fl ow that creates all the underlying circuit elements required for driving and ultimately displacing the mirrors by electrostatic forces. The micromirrors are squares with microns length, made out of a highly refl ective aluminium alloy. A micrograph of a group of micromirrors can be seen in Fig. 2. One element has been removed to provide visual access to the underlying hingesupport structure. The addressing circuitry under each mirror pixel is a memory cell (a CMOS SRAM) that drives two electrodes under the mirror with complementary voltages. Ink-jet printer heads and digital mirror devices can presently be regarded as the most successful microsystems on the market. This demonstrates the extraordinary commercial potential of microactuators in an impressive way. Saarland University Department of Mechatronics Prof. Dr. rer. nat. Helmut Seidel D Saarbrücken Phone +49(0) Fax +49(0) Mail seidel@lmm.uni-saarland.de Web 15

16 Contributions to Topical Fields of Innovation Micro Energy Harvesting Energy Supply for distributed embedded Microsystems Prof. Dr. Ing. Peter Woias IMTEK Speaker of the DFG Research Training Group GR 1322 Micro Energy Harvesting Today we live in a highly networked information society. The internet spectacularly metamorphoses into a worldwide wireless information system. Just as rapidly, the number of distributed embedded systems grows, in production technology, building technology, medical technology, security technology, or transportation technology, without which modern society would be inconceivable. Radio communication is used more and more within these systems since it offers, just like in the world wide web, fl exible expansion and mobility. Power supply for the system nodes is still done via cable or battery, increasingly causing disadvantages. In factories, buildings, and vehicles, power and data cables for the distributed systems have become a signifi cant cost factor. These cable networks can be faulty, heavy and expensive; they must be laid, extended and serviced manually. Rarely are batteries a useful alternative. From a technical point of view, temperature, vibration or corrosion set tight Bio fuel cell for a direct metabolism of glucose Organic PV cell on a glass substrate Piezoelectric vibration harvester fabricated in polymer-composite technology Piezoelectric vibration harvester with a stressoptimated beam shape limits, so do maintenance and disposal from an economical point of view. Therefore, there is an urgent need to solve the energy problem for distributed embedded systems given their increasing complexity and widespread use. Micro Energy Harvesting, Energy Harvesting or Energy Scavenging are buzz words for a completely new concept for reliable energy supply to distributed systems preferably small, robust and low-power microsystems without cables or batteries. Basically, Micro Energy Harvesting follows the principles of biological energy systems. The required electrical energy is harvested from the immediate environment of the system node. Mechanical energy from vibrations, sounds or fl ows can be used through piezoelectric, electromagnetic or capacitive generators, heat energy can be used via thermoelectric converters, energy from light with solar cells, and chemical binding energy with bio fuel cells. The harvested energy is collected in storage and is rationed with an intelligent energy management such that the system node can operate reliably. The resulting vision of an energy autonomous embedded system is enticing: the system nodes supply themselves with energy during their life span, i.e. cable 16

17 Contributions to Topical Fields of Innovation networks and battery changes become obsolete. They work at previously hard or impossible to reach locations, e.g. inside car tires, in medical prostheses and implants, at high voltage lines or building fronts. The extension of distributed systems happens through simple installation of new system nodes. Hybrid combinations of wired network hubs and energy-autonomous nodes allow high data rates as well as widely distributed systems. Tapping into environmental energy also enables new product concepts: One can imagine and, partially, these are already reality alarm triggers which obtain their energy from the disturbances which they monitor, medical monitoring systems operated through our body heat and motion, smart pills which get their energy from the chemical processes in the digestive tract, but just as well energy-autonomons MP3 players. In general, biological energy systems use the principle function follows energy, in contrast to the technical priority energy follows function. Therefore, the long term consequences of Energy Harvesting are revolutionary new, biologically inspired, embedded systems. These systems will live a technical life in their environment. Design and operational concept are, in analogy to biological principles, life adapted, ensuring function also under varying energy and data supplies. Like biological organisms, they adapt their activity to the energy supply, use different energy sources, are aware of their own resources, and utilize these effi ciently. This radical switch to energy and data adaptive design principles promises over and above energy autonomy a drastically increased operational reliability of embedded systems and opens up totally new perspectives. The visions outlined here set ambitious goals and require varied and multidisciplinary research efforts, for example to develop new materials for most effi cient energy transformers and energy storage, energy effi cient ultra low power microelectronics, or energy effi cient software algorithms and monitoring strategies. First steps have been made in Germany and Europa: Since October 2006, the DFG Research Training Group Micro Energy Harvesting works in Freiburg on innovative technologies and concepts for energy transformation, storage and management. Just recently, the BMBF included development and application of Energy Harvesting in their calls for proposals Energy autonomous Microsystems and Research for Civil Safety. MEMS with energy harvesting Likewise, the current EU framework program calls Energy Harvesting one of the key technologies for research support. At the moment, Energy Harvesting is one of the notable future technologies of MST. Nobody denies the high relevance of this new energy technology for distributed embedded microsystems of tomorrow. An interesting question is if and when we will begin to utilize other successful principles of nature for more advanced and truly bioinspired embedded microsystems. Albert-Ludwigs-University Freiburg, Department of Microsystems Energeering (IMTEK) Laboratory for Design of Microsystems Prof. Dr. Ing. Peter Woias Georges-Köhler-Allee 102 D Freiburg Tel. +49(0) Fax +49(0) Mail woias@imtek.de Web www. imtek.de/konstruktion 17

18 Contributions to Topical Fields of Innovation Micro-Optics Dr. Jürgen Mohr, Research Center Karlsruhe, Institute for Microsystems Technology Micro-optics is one of the technological foundations of photonics, which is considered a key technology for the 21st century. Micro-optical technologies are important especially in information technology, life sciences, and sensor technology. Being the basis for technological developments and their applications, they have led the way in important innovations in all future-oriented industries. Examples are DVD players, cell phone cameras, backlit projectors, or handheld analyzers. Miniaturization and increased system integration drive innovations, by increasing functionality of optical systems and reducing costs. Micro-optics includes both wave guide as well as free space optical components and systems manufactured with micro-technological processes. Because of the associated variety of possibilities, one fi nds micro-optical components in many applications. This was in evidence on the Microsystems Technology Congress 2007 in Dresden. Especially in sensor technology, the potential of micro-optics as pacesetter is evident. Together with other microsystems technologies, compact, highly functional, low-noise, zero-contact and non-destructively measuring sensors can be implemented. Their application reaches from automotive technologies, security and automation technologies, to medical diagnosis and analysis technologies. Examples for micro-optical systems are optical gas sensors, light and image sensors in photo technology, fi ber-optical tension sensors in building and bridge construction, and optical pressure or distance sensors. Work at the research center Karlsruhe is concentrated in the latter areas. Based on a modular concept, micro-spectrometers or distance sensors were developed. The modular assembly of micro-optical sensor systems is based on a separation of different functions (beam formation, light generation and detection, beam modulation) into different modules. Since these are implemented using specifi c technologies, a higher degree of optimization becomes possible. The worlds smallest micro-spectrometer, developed at the research center, is successfully being manufactured since a few years (Boehringer Ingelheim microparts), and is applied from the UV to the infrared. At the moment, a Confocal micro-optical distance sensor to measure inside tiny holes In communication technology, optical data transfer is the only way to satisfy the steadily growing need for transmission capacity. Furthermore, optical data transmission is brought ever closer to the subscriber, opening up new applications for micro-optics. To this end, micro-optics delivers a multitude of micro-optical components like, e.g., simple switches, micro-optical lenses, prisms, fi lters or light wave guides in glass and in polymers, but also complex optical switches and switch matrices. 18

19 Contributions to Topical Fields of Innovation Concept of a biophotonic plattform with integrated laser source, photodetector, fl uid channels and sensor structures chips using lithographic or molding techniques allow manufacture of low cost disposable sensors. The European Union has realized the importance of this application area for optics and, since the middle of this year, funds the Euro pean excellence network Photonics4Life. miniaturized interferometer incorporating a micro-actor is being developed. Micro-optics has become a decisive factor for success, also in beam formation of laser light. Only after high-quality micro-optics became available, high power diode lasers came to the forefront. Both in laser structuring and in high resolution lithography, beam formation with microoptical components or precise imaging with micro-lenses have become an important aspect. In the promising technology area of bio photonics a huge potential for microoptics with excellent market chances has developed. Of special interest is the possibility to reduce costs in health care through micro-optics. The application spectrum ranges from medical diagnosis to control of innovative medicaments. Besides the development of new imaging processes for the micro and nano range, optical analysis procedures based on micro-optical components (with potential to work in parallel) for spectral analysis or detection of fl uorescent markers become necessary. Microoptics makes small and cost effective systems, directly combining fl uidics and optics, possible. The Karlsruhe Institute for Technology (KIT), a joint venture of the Research Center and the university within the German excellence initiative for universities, has created a new research group in this fi eld. Opto-fl uidic polymer chips are being developed there. Fluidic structures, wave guide structures, polymer lasers, and detectors are combined into a single chip. Insertion of suitable transducer structures into the opto-fl uidic interaction region is meant to allow simple ways to analyze bodily fl uids, cells or other organisms relevant in illnesses. Implementation of The fact that micro-optics in Germany has reached a very high state of development was pointed out not just on the microsystems technology congress. German research institutions working in this fi eld are at the forefront worldwide. The industrial utilization of this research is pushed especially by small and medium enterprises. They gain ever larger importance as OEM manufacturers and sources of micro-optical components. This trend will continue in the coming years, leading to a signifi cant share for micro-optics in the predicted 40% increase in the labor force in optics by the year Forschungszentrum Karlsruhe Institut für Mikrosystemtechnik Dr. Jürgen Mohr Hermann-von-Helmhotz-Platz 1 D Eggenstein-Leopoldshafen Phone +49(0) Fax +49(0) Mail Juergen.Mohr@imt.fzk.de Web 19

20 Contributions to Topical Fields of Innovation High Brightness LEDs for Light Engines containing a connector, surge protection devices and temperature sensor. Changing the interconnect material and replacing the aluminium core material with copper decreases thermal resistance; fi nite element simulation promised a drop from 2.8 K/W down to 1.7 K/W. These values could be also demonstrated in measurements where the old assembly version showed 2.75 K/W and new components only about 1.8 K/W. More important: The new concept maintains that low value after 1,000 thermal cycles from 40 C to C. Fig 1: OSTAR LE x H3A for projection light engines Abstract The ability to increase the output performance of LED-powered projectors is imminent. A mixture of advanced LED chip and packaging technologies, optimised light extraction and improved optical aspects of LED-based projection light engines allows improved brightness by up to a factor of 10. Introduction When LED-powered projectors were commercialised, they delivered only 10 to 15 real lumens; subsequent product development has therefore focused on increasing brightness. Chip performance increased with the introduction of the Thinfi lm technology. High refl ective internal mirrors combined with thin epi layers and textured surfaces are causing less internal photon reabsorption as light travels through the chip. In recognition of this outstanding scientifi c and technical achievements in this Thinfi lm technology and related Ostar packaging and optics technologies OSRAM was awarded with the German Future Prize. This chip technology negates prior limitations of total internal refl ection by scattering refl ected light back into the chip. By increasing the current spreading capability of the epitactical layers, LED effi ciency at higher currents does not drop as dramatically as conventional structures; the thermally induced rollover of InGaAlP LEDs is enhanced from about 1.5 A/mm² to far beyond 3 A/m². This improved chip performance also requires package improvements. Fig. 1 shows an Ostar for projection light engines. Six power LED chips are mounted to a highly thermally conductive ceramic heat sink, which is attached to a metal-core printed circuit board also Other improvement comes from implementing enhanced light extraction, which raises total fl ux from a green or blue Ostar by about 25%. The new light extraction also creates additional directionality, with total emission within +/- 80. This leads to an increasing probability that most current optics can pick up the light. On screen lumens are not only defi ned by the light source. There are also tradeoffs at the light engine level, dictated by the law of etendue conservation. The projector s micro display etendue is determined by its area A and the angle +/- theta at which the lens system can project to the screen. The refractive index n is important, but in most cases the reference media is air. The formula can be used to determine usable LED source area. Some LEDs are lambertian emitters and emit at a level of +/- 90. If we assume that the optical system collect the light over 20

21 Contributions to Topical Fields of Innovation Diag. 1: Captured fl ux from led source over collection angle, corresponding required chip area and gain vs. pure lampertian source with considering lens system transmission. Fig 2: On Screen Lumens with different illumination regimes for the projector output. the entire angle the etendue equation defi nes the max. usable LED area. But almost no optical system can collect all that light. Therefore it is better to cut off higher radiation angles and increase the chip area. The best approach to optimize the system is to fold our Ostar s angular intensity distribution with the relative angular transmission of the optical system. Diag. 1 varies the collection angle from the LED source from 0 to 90. Blue shows the percentage of collected fl ux of the LED source. Orange shows the corresponding usable chip area for a :4 imager at an F# of 2.4. Pink shows the relative system effi ciency. This shows that for a collection angle from 30 to 60, the gain is stable at about 20%, but with varying chip area. For example the solution with 6.0 mm² chip area and 55 collection angle offers 20% higher system brightness compared to the solution with 4.0 mm² chip area and 90 collection angle. We also compared three illumination projector confi gurations. First, we used a single-channel single Ostar module with three colours on one board allowing 1-to-1 replacement of a lamp with the LED module. A second approach of a two-channel illumination confi guration requires only one dichroic mirror to superimpose the green light from one Ostar with the mixed blue and red light from a second Ostar. In a third approach, two optimised dichroic mirrors combine the light of three monochrome Ostars. Fig. 2 shows estimated on screen fl ux based on previously discussed LED improvements, a DLP-based projector using a 0.55 Imager and a light engine effi ciency of 22%. Without special driving schemes for the LEDs in a pure sequential operation of the colours, the single channel delivers more than 50 lm, the twochannel gives more than 100 lm and the three-channel solution surpasses 150 lm. The new Ostar Projection LE x G3W and LE x H3W open the door for next-generation LED projectors in the range of Lumens on screen. With optimized systems, LED projectors of 200 to 300 lumens are possible this year. OSRAM Opto Semiconductors GmbH Stefan Grötsch Leibniz Str. 4 D Regensburg Phone +49(0) Mail stefan.groetsch@osram-os.com Web 21

22 Contributions to Topical Fields of Innovation Intelligent Implants Prof. Dr.-Ing. Thomas Stieglitz IMTEK Laboratory for Biomedical Microtechnology Monitoring of signals from natural sensors and actuators can be used to control intelligent implants in therapy and rehabilitation. Technical aids are essential parts of modern medicine. Microsystems engineering is amongst the enabling technologies for complex intelligent implants with small size and high functionality that will improve quality of life and treatment effi cacy. Miniaturization and integration of sensors, actuators, and microcomputers will be combined to adapt intelligent implants to the changing physiological environment in real-time. Local monitoring of metabolic and electrical signals and their use as control variable will combine diagnosis with patient specifi c therapy. According to technical standards and approval procedures, active implants belong to the most complex class of medical devices. For Europe, legal requirements are summarized in the Active Medical Device Directive (AIMD). In clinical practice, however, many implants are classifi ed as non-active. Joint endoprostheses, drug delivery devices driven by gas pressure or osmosis, and implantable valves for hydrocephalus help a large number of patients but do not have an electrical power supply nor do they exchange electrical energy with the human body. In clinical practice, active implants are mainly established in cardiology and neurology. Heart pacemakers to treat rhythm or conduction disorders help millions of patients to live their life light-heartedly. Implantable defi brillators detect fi brillation and shoot the heart back into its regular rhythm. In neurology, more than 140,000 spinal cord stimulators have been implanted to treat chronic pain and urge incontinence. Electrical stimulation of the vagal nerve helps more than 17,000 patients with medical refractory epilepsy and severe depression. Deep brain stimulation alleviates the symptoms of Parkinson s disease like tremor and dyskinesis in more than 20,000 cases. Neuroprosthetic implants to restore motor and sensor functions are of high interest but many of them are still under development. The most successful application is the cochlea implants to restore hearing with more than 100,000 devices worldwide. The technological race for the fi rst vision prosthesis has entered the clinical trial phase with German companies at the cutting edge. Nowadays implants are successful due to their robustness: Titanium housings with a limited number of hermetic feedthroughs, robust precision mechanics cables and electrodes led to safe chronic implants. However, this construction paradigm limits the complexity and degree of miniaturization. More complex implants need different technological solutions. Intelligent Implants are established in therapy as well as in rehabilitation. 22

23 Contributions to Topical Fields of Innovation The complexity of an application determines the degree of miniaturization and the adequate manufacturing technology Novel applications of intelligent implants in orthopedics and in neurology, dealing with the treatment of large common diseases and specifi c diseases of an aging society are of high interest. The specifi cations of long-term stability and functionality over decades are still unsolved for implantable microsystems and require solutions for key components like energy supply and data transmission, biocompatible assembly and packaging technologies as well as novel hermetic encapsulation concepts for miniaturized implants. Let us have a more detailed view on some key aspects: The material-tissue interface is among the most challenging tasks within an active intelligent implant. So far, bioinert behavior resulting in a thin fi brous tissue layer on the electrode is the best result one can obtain. Highly complex microimplants, e.g. intracortical multishank electrodes, often fail solely due to the foreign body reactions following the implantation procedure that separate the nerve cells from the recording electrodes. The development of tailor-made surfaces and better mechanical adaptation of the technical system to the brain tissue might lead to better performance. The miniaturization of implants is driven by limited anatomical space. The selection of the adequate technology should only be determined by the degree of miniaturization necessary for the specifi ed system complexity. So far, clinical implants have a low complexity combined with excellent robustness. They use approved materials and hermetic housing components. Having medium complexity, laser structuring is a good method to obtain smaller structure size while still using the same materials. Only when smallest structure sizes and large numbers of sensors or actuators are needed, the use of microsystem technology is advantageous. In general, silicon and polymers are suitable for implantation but these materials do not have approval for the use in implantable medical devices. Evaluation in accredited test laboratories has to accompany the device development. Novel energy supply concepts will have strong impact of on intelligent implants. If implants have to record continuously data from the body to interact with the environment, batteries or inductive coupling might not be suffi cient to power the system at a high degree of miniaturization. New research lines focus on energy harvesting approaches (see contribution of P. Woias) to develop autonomous energy supply solutions for microsystems. The measurement of state variables from implants might help to monitor loosening of hip and knee prostheses and to quantify forces in dental brackets. Telemetric data from force and acceleration sensors integrated into the implants would help improve diagnosis and will prevent unnecessary surgical re-interventions. Microsystem technologies will signifi - cantly contribute to intelligent implants and patient specifi c therapies. A manifold of developments will converge to build long-term stable and functional intelligent implant of the future that will be less recognized as a foreign body than actual clinical implants. IMTEK University of Freiburg Department of Microsystems Engineering Prof. Dr.-Ing. Thomas Stieglitz Georges-Koehler-Allee 102 D Freiburg Phone +49(0) Fax +49(0) Mail stieglitz@imtek.uni-freiburg.de Web 23

24 Contributions to Topical Fields of Innovation Latest Results and Solutions in Preventive Micromedicine Dipl.-Ing. Johannes Dehm VDE Initiative MikroMedizin Introduction On account of its potential for miniaturisation and its high degree of functional density, microsystems technology can play a major role in the development of new products and services for prevention and monitoring, and also in improving the integration of therapy monitoring. Microsystems such as those used in implantable or extracorporeal sensor systems can enable continuous progress monitoring for a whole range of indications such as high blood pressure, palpitations or blood sugar. In the case of chronic disease, continuous monitoring of parameters is crucial for a therapy s success, both in terms of managing the treatment and also detecting any deterioration in the condition. Current state-of-the-art A range of physiological parameters need to be monitored in order e.g. to assess the condition of the cardiovascular system. The current state-of-the-art is best shown from the example of the two key vital parameters: blood pressure and cardiac rhythm. Measuring blood pressure is the keystone for the diagnosis, management and treatment of arterial high blood pressure (hypertonia). Any decisions concerning aspects of arterial hypertonia are infl uenced positively or negatively by the precision of the measurements. Besides the indirect measurement of blood pressure by the doctor ( occasional measurement ), measurements can also be taken while patients go about their daily business, i.e. during their daily activities and while sleeping, by means of 24 hour blood pressure measurement. The high measurement frequency throughout the day (every 15 minutes) and the night (every 30 minutes) means that the 24 hour measurement provides signifi cantly improved therapy monitoring in comparison to occasional measurements taken by a doctor. This applies in particular to diffi cult-to-gauge hypertonia patients. It helps optimise the dosages of a combination of different medicines, or prevent over or under treatment. Innovative methods are required to monitor the blood pressure of patients over a longer-term and on a stress-free basis without the use of a compression cuff. Extracorporeal methods include the recording of the cardiovascular parameters of blood fl ow and pulse-wave velocity. This allows the blood pressure to be measured pulse by pulse using intelligent signal processing. Work is progressing rapidly on the development of marketable telemetric sensors (intra or extracorporeal) for measuring blood pressure in the BMBF Preventive MicroMedicine (PMM) project. An implantable and subsequently removable telemetric pressure measurement system is being developed for hospital use for the long-term blood pressure monitoring of hypertonia patients whose medication requirements are diffi cult to gauge. The advantage for patients lies in the fact that, in contract to external measurement techniques, the system, once implanted, is not perceptible and therefore does not diminish the patient s quality of life. Animal-based tests are currently being carried out on the biocompatibly coated prototype, consisting of pressure and temperature sensors, assessment electronics, a telemetry unit and an external reading station. Hyper-IMS blood pressure sensor. Source: Fraunhofer-IMS Given the range of transmission technologies now available such as ISDN, DSL, GSM, UMTS and their IP pro- 24