MOEMS based sensor systems for smart mobility, smart manufacturing and smart home Thomas Fleischmann, Public Funded Projects

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1 EPoSS Annual Forum Leuven MOEMS based sensor systems for smart mobility, smart manufacturing and smart home Thomas Fleischmann, Public Funded Projects 1

2 The Internet of Things Everyone & everything connected People connected Devices connected 5 billion billion devices in billion World population People connected to the internet billion vehicles billion in telemedicine billion in security 7.3bn billion smart meters 5.7bn 6.5bn billion TVs billion tablets 3 billion 0,7% 15% 75% billion mobile phones billion laptops billion desktops billion servers 2 billion 1 billion

3 The Internet of Things Smart Sensor Systems Multiple sensors / actuators Connectivity Microcontroller Embedded Software IoT Power management Small form factor Smart Sensor Systems: Enabler for IoT 3

4 Sensors the IoT enabler Bosch the Micromechanics Pioneer Bosch - a MEMS pioneer with more than 20 years of experience First product in 1995: pressure sensor for automotive applications 5 billion MEMS sensors produced 1.4 billion units in 2014 #1 in MEMS sensors: Bosch Creator of the Bosch Process (Deep Reactive Ion Etch - DRIE) More than 1000 patents in the MEMS sensor field European inventor of the year (2007) for the Bosch process German Future Prize of the Federal President in 2008 for Bosch MEMS 4

5 Sensors the IoT enabler Three pillars of Bosch MEMS for Automotive applications MEMS for Consumer applications Automotive Electronics Bosch Sensortec Akustica Acceleration, angular rate, pressure and mass flow sensors Headquartered in Reutlingen near Stuttgart, Germany Acceleration, magnetic, gyroscope, pressure and environmental sensors Headquartered in Reutlingen MEMS microphones Headquartered in Pittsburgh, PA, USA 5

6 Accumulated Sensor Production (mio) Sensors the IoT enabler Volume MEMS production at Bosch (accumulated)

7 MOEMS for smart mobility Benefits Increased Safety Traffic Management Fuel Efficiency Reduced Pollution Increased Mobility 7

8 MOEMS for smart mobility Smart mobility applications - MEMS Airbag systems Acceleration (high-g) and pressure sensors for occupant protection Acceleration sensors (low-g) and angular rate sensors for rollover sensing Engine management Pressure sensors for efficient and clean engine management concepts Transmission control Medium pressure sensors for hydraulic pressure Vehicle Dynamics Control Acceleration sensors (low-g), angular rate sensors and combi modules for VDC (ESP ) Many new functions and solutions required for emobility and connected & automated vehicles 8

9 MOEMS for smart mobility Smart mobility applications - MOEMS Adaptive laser head light Most flexible light distribution for: Glare free high beam New light functions (marking, road works,..) Highest luminosity for best range New possibilities for car design Working principle Public funded project ILAS Partner: Audi AG (Requirements) Osram (Laser diode, Phosphor) KIT (Physiological aspects) BOSCH (micro mirror) Target: 1 st car M16 9 AE/PRM-S-Stötzler Robert Bosch GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion, Bearbeitung, Weitergabe sowie für den Fall von Schutzrechtsanmeldungen.

10 MOEMS for smart production Benefits Process Control Increase of Utilization Maintenance on Time Transparency Material Availability and Quality 10

11 MOEMS for smart production Smart production applications - MEMS Acceleration Gyroscope Sensors & Functions Applications Monitoring of tool life-cycle Detection of cycle interruptions Detection of process deviations Support of predictive maintenance Temperature Time e.g. molding tool Benefits Optimized maintenance cycles Optimized production throughput Automated ordering of spare parts and supplies Support for logistics and production planning Multi-DoF Integration possible 11

12 MOEMS for smart production Smart production applications - MOEMS Sensors & Functions IR based CO 2 detection Applications Air quality monitoring and control for automotive applications Control of air conditioning units Measurement principal extendable to industrial applications Benefits Fast and reliable detection of CO 2 Highly selective detection with long term stability Robust sensor concept for automotive and industrial applications Multi-DoF Integration possible 12

13 MOEMS for smart home Benefits Security Safety Well-being Convenience Remote Monitoring & Control 13

14 MOEMS for smart home Smart home applications - MEMS Sensors & Functions Acceleration Gyroscope Geomagnetic sensor Buzzer Battery life time: up to two years ( closing cycles assumed) Wireless data transmission Applications Home safety monitoring Energy efficiency management Ambient assisted Living Benefits Easy and fast installation Multiple event detection Flexible usage for doors and windows Extendable for many different use cases 14

15 MOEMS for smart home Smart home applications - MOEMS Applications Compact laser projection modules Entertainment functions Gesture detection and control functions Ambient light definition Benefits Design of intuitive user interfaces Improved image quality Extended life time Compact form factor for new applications 15

16 Challenges for MOEMS Technology challenges New silicon photonics technologies New sensing methods Advanced MEMS technologies for high volume production Technology Platform Micro-optical elements for new applications Advanced packaging solutions New 3D integration concepts 16

17 Challenges for MOEMS System level challenges Multi-DoF Sensing/Acting Connectivity etc. Energy etc. SW Required Features Multi DoF sensing/acting Connectivity Power management Configurability Update capability Usability Application specific algorithms Data fusion Data security 17 T. Fleischmann (AE/EAC) Robert Bosch GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung,

18 Challenges for MOEMS Required competences Optics design SW algorithms* (gesture, well-being, ) Chemical / Bio sensor design ASIC design, SystemC models Low power µc design Wireless connectivity Advanced packaging (SiP WLCSP) MOEMS design/technology Software and advanced packaging are gaining weight, SW is the new ASIC 18 Jan Peter Stadler Robert Bosch GmbH Alle Rechte vorbehalten, auch bzgl. jeder Verfügung, Verwertung, Reproduktion, Bearbeitung, Weitergabe sowie für den Fall von Schutzrechtsanmeldungen.

19 MOEMS based Technology Platform for IoT-Applications Thank you for your attention 19